但是MEMS金属氧化物气体传感器中的微加热器还没有得到优化
在本文中,我们已经研究出一种方法(软件)用于设计和优化MEMS气体传感器中的微加热器
关键词： MEMS金属氧化物气体传感器
微机械金属氧化物系气敏元件的热特性要针对低功耗进行优化
正在研制的硅材料微型金属氧化物气体传感器克服了这些缺陷
微机械气体传感器的大部分功耗包括各种通过硅衬底传导的热损失,通过所有接触面和辐射向空气中传送
） 摘要： 传统的金属氧化物气体传感器通常用于测量可燃性烃类气体和其他有毒气体
） Abstract： Traditional metal-oxide gas sensors are usually used to measure the flammability of hydrocarbon gases and other toxic gases
However, they are the existence of two defects, namely (a) higher operating temperature (not less than 300 ℃) and (b) greater power (more than one watt)
Being developed by micro-silicon metal-oxide gas sensors to overcome these deficiencies
Micro-machined gas sensor including the majority of power through the silicon substrate conduction heat loss through all the contact surfaces and radiation transfer to the air
Micro-machined metal oxide gas sensor of the hot line to address low-power characteristics are optimized through the sensing layer and the transient response of the control of appropriate temperature distribution
However, MEMS metal oxide gas sensors in the micro-heater has not been optimized
In this paper, we have developed a method (software) used in the design and optimization of MEMS gas sensor micro-heater
The use of this software can estimate the power required to reach a certain temperature as well as the active layer temperature distribution
Keywords： MEMS metal oxide gas sensors;Micro-heater;Thermal analysis;Dynamic optimization 下载PDF阅读器 PDF全文下载： 初稿 （ 217 ） 作者简介： 通信联系人： 【收录情况】 中国科技论文在线： 曾增烽
智能MEMS气体传感器中微加热器的优化设计[EB/OL]
